Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11747789 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Naofumi Ohashi, Toshiyuki Kikuchi, Tadashi Takasaki | 2023-09-05 |
| 11749550 | Method of manufacturing semiconductor device by setting process chamber maintenance enable state | Yasuhiro MIZUGUCHI, Naofumi Ohashi, Tadashi Takasaki | 2023-09-05 |