Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11749550 | Method of manufacturing semiconductor device by setting process chamber maintenance enable state | Naofumi Ohashi, Tadashi Takasaki, Shun MATSUI | 2023-09-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11749550 | Method of manufacturing semiconductor device by setting process chamber maintenance enable state | Naofumi Ohashi, Tadashi Takasaki, Shun MATSUI | 2023-09-05 |