Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854799 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Toshiyuki Kikuchi | 2023-12-26 |
| 11705326 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kimihiko NAKATANI, Motomu DEGAI, Kenji Kameda | 2023-07-18 |
| 11562905 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Motomu DEGAI | 2023-01-24 |