Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848203 | Methods of processing substrate and manufacturing semiconductor device by forming film, substrate processing apparatus, and recording medium | Takashi Nakagawa, Kimihiko NAKATANI, Motomu DEGAI, Takao Izaki, Yoshitomo HASHIMOTO | 2023-12-19 |
| 11626280 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Kimihiko NAKATANI | 2023-04-11 |