Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11842888 | Removing metal contamination from surfaces of a processing chamber | Jengyi Yu, Seongjun Heo, Ge Yuan, Siva Kanakasabapathy | 2023-12-12 |
| 11670516 | Metal-containing passivation for high aspect ratio etch | Karthik S. Colinjivadi, Shih-Ked Lee, George Matamis, Yongsik Yu, Yang Pan +4 more | 2023-06-06 |
| 11594429 | Plasma etching chemistries of high aspect ratio features in dielectrics | Keren Jacobs Kanarik, Yang Pan, Jeffrey Marks | 2023-02-28 |