Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11721558 | Designer atomic layer etching | — | 2023-08-08 |
| 11594429 | Plasma etching chemistries of high aspect ratio features in dielectrics | Samantha Tan, Yang Pan, Jeffrey Marks | 2023-02-28 |