Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848212 | Alternating etch and passivation process | Seongjun Heo, Chen-Wei Liang, Alan J. Jensen, Samantha Tan | 2023-12-19 |
| 11842888 | Removing metal contamination from surfaces of a processing chamber | Samantha Tan, Seongjun Heo, Ge Yuan, Siva Kanakasabapathy | 2023-12-12 |
| 11551938 | Alternating etch and passivation process | Seongjun Heo, Chen-Wei Liang, Alan J. Jensen, Samantha Tan | 2023-01-10 |