Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11842888 | Removing metal contamination from surfaces of a processing chamber | Jengyi Yu, Samantha Tan, Seongjun Heo, Siva Kanakasabapathy | 2023-12-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11842888 | Removing metal contamination from surfaces of a processing chamber | Jengyi Yu, Samantha Tan, Seongjun Heo, Siva Kanakasabapathy | 2023-12-12 |