Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728136 | RF pulsing within pulsing for semiconductor RF plasma processing | Maolin Long, Ying Wu, Alex Paterson | 2023-08-15 |
| 11728137 | Direct frequency tuning for matchless plasma source in substrate processing systems | Maolin Long, Ying Wu, Alexander Paterson | 2023-08-15 |
| 11716805 | Matchless plasma source for semiconductor wafer fabrication | Maolin Long, Ricky Marsh, Alex Paterson | 2023-08-01 |