Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823928 | Control of wafer bow in multiple stations | Edward Augustyniak, David French, Yukinori Sakiyama, George Thomas | 2023-11-21 |
| 11784027 | Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal | Hyungjoon Kim, Karl Leeser, Vince Burkhart | 2023-10-10 |
| 11594397 | Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system | Eller Y. Juco, Karl Leeser, David French, Aaron Bingham, David Alan Metz +3 more | 2023-02-28 |