Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11587764 | Magnetic housing systems | Srinivas Gandikota, Tza-Jing Gung, Samuel E. Gottheim, Timothy Joseph Franklin, Pramit Manna +3 more | 2023-02-21 |
| 11560626 | Substrate processing chamber | Timothy Joseph Franklin, Adam J. Fischbach, Edward Haywood, Abhijit Basu Mallick, Pramit Manna +2 more | 2023-01-24 |
| 11557466 | Tuneable uniformity control utilizing rotational magnetic housing | Samuel E. Gottheim, Abhijit Basu Mallick, Pramit Manna, Eswaranand Venkatasubramanian, Timothy Joseph Franklin +2 more | 2023-01-17 |