Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11847776 | System using film thickness estimation from machine learning based processing of substrate images | Arash Alahgholipouromrani, Dominic J. Benvegnu, Jun Qian, Kiran Shrestha | 2023-12-19 |
| 11836913 | Film thickness estimation from machine learning based processing of substrate images | Arash Alahgholipouromrani, Dominic J. Benvegnu, Jun Qian, Kiran Shrestha | 2023-12-05 |
| 11679466 | Filtering during in-situ monitoring of polishing | — | 2023-06-20 |
| 11577362 | Pad conditioner cut rate monitoring | Sameer Deshpande, Jason Garcheung Fung | 2023-02-14 |