Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774866 | Active reticle carrier for in situ stage correction | Avner Safrani, Adi Pahima, Ron Rudoi | 2023-10-03 |
| 11638938 | In situ process chamber chuck cleaning by cleaning substrate | Mor Azaria, Giampietro Bieli, Adi Pahima, Yoram Uziel | 2023-05-02 |
| 11607716 | Systems and methods for chuck cleaning | Mor Azaria, Yoram Uziel, Giampietro Bieli, Adi Pahima | 2023-03-21 |
| 11569138 | System and method for monitoring parameters of a semiconductor factory automation system | Mor Azarya, Michael D. Brain, Ami Appelbaum, Arie Hoffman | 2023-01-31 |