Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11721545 | Method of using dual frequency RF power in a process chamber | Anup K. Singh, Vinayak Vishwanath Hassan, Bhaskar Kumar, Krishna Nittala, Pramit Manna +2 more | 2023-08-08 |