Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11781212 | Overlap susceptor and preheat ring | Zhepeng CONG, Schubert S. Chu, Nyi O. Myo, Kartik Shah, Zhiyuan Ye | 2023-10-10 |
| 11784076 | Substrate transfer mechanism to reduce back-side substrate contact | Masato Ishii, Richard Giljum, Alexander Berger | 2023-10-10 |