Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11615984 | Method of dielectric material fill and treatment | Shi YOU, He Ren, Naomi Yoshida, Nikolaos Bekiaris, Mehul Naik +2 more | 2023-03-28 |
| 11581183 | Methods of forming amorphous carbon hard mask layers and hard mask layers formed therefrom | Bhargav S. Citla, Srinivas D. Nemani | 2023-02-14 |
| 11566325 | Silicon carbonitride gapfill with tunable carbon content | Bhargav S. Citla, Joshua Rubnitz, Jethro Tannos, Chentsau Chris Ying, Srinivas D. Nemani +1 more | 2023-01-31 |