Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11804372 | CD dependent gap fill and conformal films | Jung Chan Lee, Praket P. Jha, Jinrui GUO, Wenhui Li | 2023-10-31 |
| 11615984 | Method of dielectric material fill and treatment | Shi YOU, He Ren, Naomi Yoshida, Nikolaos Bekiaris, Mehul Naik +2 more | 2023-03-28 |