Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11853042 | Part, sensor, and metrology data integration | Garrett H. Sin, Sidharth Bhatia, Katty Marie Lydia Gamon Guyomard, Shawyon Jafari, Heng-Cheng Pai +2 more | 2023-12-26 |
| 11566327 | Methods and apparatus to reduce pressure fluctuations in an ampoule of a chemical delivery system | Muhammad M. Rasheed, Kenric Choi, Tatsuya Sato | 2023-01-31 |
| 11562914 | Heater cover plate for uniformity improvement | Muhammad M. Rasheed | 2023-01-24 |