Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830734 | Thermal deposition of silicon-germanium | Susmit Singha Roy, Abhijit Basu Mallick | 2023-11-28 |
| 11791155 | Diffusion barriers for germanium | Susmit Singha Roy, Takehito Koshizawa, Bo Qi, Abhijit Basu Mallick, Nitin K. Ingle | 2023-10-17 |
| 11781218 | Defect free germanium oxide gap fill | Susmit Singha Roy, Takehito Koshizawa, Bo Qi, Abhijit Basu Mallick | 2023-10-10 |
| 11702751 | Non-conformal high selectivity film for etch critical dimension control | Bo Qi, Yingli Rao, Abhijit Basu Mallick | 2023-07-18 |