Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11802220 | Silica-based slurry for selective polishing of carbon-based films | Brian Reiss, Fernando HUNG LOW, Michael M. Morrow | 2023-10-31 |
| 11597854 | Method to increase barrier film removal rate in bulk tungsten slurry | William J. Ward, III, Matthew E. Carnes, Ji Cui | 2023-03-07 |