Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11802220 | Silica-based slurry for selective polishing of carbon-based films | Fernando HUNG LOW, Michael M. Morrow, Helin Huang | 2023-10-31 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11802220 | Silica-based slurry for selective polishing of carbon-based films | Fernando HUNG LOW, Michael M. Morrow, Helin Huang | 2023-10-31 |