Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11761080 | Method for processing a substrate by oscillating a boundary layer of the flow of one or more process gases over a surface of a substrate and systems for processing a substrate using the method | Tsung-Han Yang | 2023-09-19 |
| 11732355 | Method and apparatus for supplying improved gas flow to a processing volume of a processing chamber | Vishwas Kumar Pandey, Eric Kihara Shono, Kartik Shah, Agus Sofian Tjandra, Tobin Kaufman-Osborn +2 more | 2023-08-22 |
| 11615944 | Remote plasma oxidation chamber | Eric Kihara Shono, Lara Hawrylchak, Agus Sofian Tjandra, Chaitanya A. PRASAD, Sairaju Tallavarjula | 2023-03-28 |
| 11610776 | Method of linearized film oxidation growth | Tobin Kaufman-Osborn | 2023-03-21 |
| 11581408 | Method and apparatus for selective nitridation process | Matthew S. Rogers, Roger Curtis, Lara Hawrylchak, Canfeng Lai, Bernard L. Hwang +2 more | 2023-02-14 |
| 11569245 | Growth of thin oxide layer with amorphous silicon and oxidation | — | 2023-01-31 |