Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815803 | Multilayer extreme ultraviolet reflector materials | Wen Xiao, Vibhu Jindal | 2023-11-14 |
| 11669008 | Extreme ultraviolet mask blank defect reduction methods | Wen Xiao, Sanjay Bhat, Shiyu Liu, Vibhu Jindal, Azeddine Zerrade | 2023-06-06 |