Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798803 | Dynamic multi zone flow control for a processing system | Daemian Raj Benjamin Raj, Gregory Eugene CHICHKANOFF, Shailendra Srivastava, Sai Susmita Addepalli, Nikhil Sudhindrarao Jorapur +1 more | 2023-10-24 |
| 11784229 | Profile shaping for control gate recesses | Akhil Singhal, Sang Jin Kim, Zeqiong Zhao, Zhijun Jiang, Deenesh Padhi +1 more | 2023-10-10 |
| 11646216 | Systems and methods of seasoning electrostatic chucks with dielectric seasoning films | Akhil Singhal, Zeqiong Zhao, Sang Jin Kim, Zhijun Jiang, Deenesh Padhi +1 more | 2023-05-09 |