Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852964 | Method for manufacturing reflective mask blank, reflective mask blank, method for manufacturing reflective mask, reflective mask, and method for manufacturing semiconductor device | Takahiro Onoue | 2023-12-26 |
| 11815806 | Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method | Yohei IKEBE | 2023-11-14 |
| 11815807 | Reflective mask blank, reflective mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device | Yohei IKEBE | 2023-11-14 |
| 11681214 | Substrate with a multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing semiconductor device | Kazuhiro Hamamoto | 2023-06-20 |
| 11561463 | Substrate with conductive film, substrate with multilayer reflective film, reflective mask blank, reflective mask, and semiconductor device manufacturing method | Masanori Nakagawa | 2023-01-24 |
| 11550215 | Reflective mask blank, reflective mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device | Yohei IKEBE | 2023-01-10 |