Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11650494 | Substrate with a multilayer reflective film, reflective mask blank, reflective mask, and semiconductor device manufacturing method | Hirofumi Kozakai | 2023-05-16 |
| 11561463 | Substrate with conductive film, substrate with multilayer reflective film, reflective mask blank, reflective mask, and semiconductor device manufacturing method | Tsutomu Shoki | 2023-01-24 |