Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11650494 | Substrate with a multilayer reflective film, reflective mask blank, reflective mask, and semiconductor device manufacturing method | Masanori Nakagawa | 2023-05-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11650494 | Substrate with a multilayer reflective film, reflective mask blank, reflective mask, and semiconductor device manufacturing method | Masanori Nakagawa | 2023-05-16 |