Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11681214 | Substrate with a multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing semiconductor device | Tsutomu Shoki | 2023-06-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11681214 | Substrate with a multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing semiconductor device | Tsutomu Shoki | 2023-06-20 |