Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815806 | Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method | Tsutomu Shoki | 2023-11-14 |
| 11815807 | Reflective mask blank, reflective mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device | Tsutomu Shoki | 2023-11-14 |
| 11550215 | Reflective mask blank, reflective mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device | Tsutomu Shoki | 2023-01-10 |