Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11842885 | Plasma processing apparatus and plasma processing method | Tooru Aramaki, Kenetsu Yokogawa | 2023-12-12 |
| 11835465 | Detecting method and detecting device of gas components and processing apparatus using detecting device of gas components | Yoshifumi Ogawa, Yutaka Kouzuma | 2023-12-05 |
| 11682542 | Plasma processing device | Tooru Aramaki, Kenetsu Yokogawa | 2023-06-20 |
| 11557463 | Vacuum processing apparatus | Hiroyuki Kobayashi, Nobuya Miyoshi, Kazunori Shinoda, Kenji Maeda, Yutaka Kouzuma +1 more | 2023-01-17 |