Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835465 | Detecting method and detecting device of gas components and processing apparatus using detecting device of gas components | Yutaka Kouzuma, Masaru Izawa | 2023-12-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835465 | Detecting method and detecting device of gas components and processing apparatus using detecting device of gas components | Yutaka Kouzuma, Masaru Izawa | 2023-12-05 |