Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835465 | Detecting method and detecting device of gas components and processing apparatus using detecting device of gas components | Yoshifumi Ogawa, Masaru Izawa | 2023-12-05 |
| 11557463 | Vacuum processing apparatus | Hiroyuki Kobayashi, Nobuya Miyoshi, Kazunori Shinoda, Kenji Maeda, Satoshi Sakai +1 more | 2023-01-17 |