Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11842885 | Plasma processing apparatus and plasma processing method | Kenetsu Yokogawa, Masaru Izawa | 2023-12-12 |
| 11682542 | Plasma processing device | Kenetsu Yokogawa, Masaru Izawa | 2023-06-20 |