Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11604414 | Photosensitive composition for EUV light, pattern forming method, and method for manufacturing electronic device | Michihiro SHIRAKAWA, Hajime Furutani, Mitsuhiro Fujita, Tomotaka Tsuchimura, Takashi Kawashima +3 more | 2023-03-14 |