Showing 1–8 of 8 inventors
| Rank | Inventor | Primary Company | Patents |
|---|---|---|---|
| 1 | Koji Yoshii | Tokyo Electron Limited | 2 |
| 1 | Manabu Honma | Tokyo Electron Limited | 2 |
| 1 | Yukio Ohizumi | Tokyo Electron Limited | 2 |
| #4 | Koichi Shimada | Canon | 1 |
| #4 | Rintaro Takao | Tokyo Electron Limited | 1 |
| #4 | Shinya Nasukawa | Tokyo Electron Limited | 1 |
| #4 | Chiaki Takeuchi | Tokyo Electron Limited | 1 |
| #4 | Masami Oikawa | Tokyo Electron Limited | 1 |