Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774859 | Method and apparatus for evaluating an unknown effect of defects of an element of a photolithography process | Alexander Freytag, Christoph Husemann, Carsten Schmidt | 2023-10-03 |
| 11631168 | Method, computer program and apparatus for determining a quality of a mask of a photolithography apparatus | Tom Moebert, Carsten Schmidt, Konrad Schoebel | 2023-04-18 |