Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11790510 | Material testing of optical test pieces | Lars Stoppe, Niklas Mevenkamp | 2023-10-17 |
| 11774859 | Method and apparatus for evaluating an unknown effect of defects of an element of a photolithography process | Christoph Husemann, Dirk Seidel, Carsten Schmidt | 2023-10-03 |