Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774859 | Method and apparatus for evaluating an unknown effect of defects of an element of a photolithography process | Alexander Freytag, Christoph Husemann, Dirk Seidel | 2023-10-03 |
| 11631168 | Method, computer program and apparatus for determining a quality of a mask of a photolithography apparatus | Tom Moebert, Dirk Seidel, Konrad Schoebel | 2023-04-18 |
| 11620429 | Method and device for superimposing at least two images of a photolithographic mask | Gilles Tabbone | 2023-04-04 |
| 11581398 | Method of fabrication of an integrated spiral inductor having low substrate loss | Gerhard Spitzlsperger | 2023-02-14 |