Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11631168 | Method, computer program and apparatus for determining a quality of a mask of a photolithography apparatus | Tom Moebert, Dirk Seidel, Carsten Schmidt | 2023-04-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11631168 | Method, computer program and apparatus for determining a quality of a mask of a photolithography apparatus | Tom Moebert, Dirk Seidel, Carsten Schmidt | 2023-04-18 |