Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11796563 | Apparatus and method for a scanning probe microscope | Ulrich Matejka | 2023-10-24 |
| 11733186 | Device and method for analyzing a defect of a photolithographic mask or of a wafer | Gabriel Baralia, Klaus Edinger, Thorsten Hofmann, Michael Budach | 2023-08-22 |
| 11680963 | Method and apparatus for examining a measuring tip of a scanning probe microscope | Kinga Kornilov, Markus Bauer | 2023-06-20 |
| 11630124 | Device and method for operating a bending beam in a closed control loop | Florian Demski | 2023-04-18 |
| 11592461 | Apparatus and method for examining and/or processing a sample | Michael Budach | 2023-02-28 |