Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11733186 | Device and method for analyzing a defect of a photolithographic mask or of a wafer | Gabriel Baralia, Christof Baur, Klaus Edinger, Thorsten Hofmann | 2023-08-22 |
| 11650495 | Apparatus and method for determining a position of an element on a photolithographic mask | Nicole Auth | 2023-05-16 |
| 11592461 | Apparatus and method for examining and/or processing a sample | Christof Baur | 2023-02-28 |