KE

Klaus Edinger

CG Carl Zeiss Smt Gmbh: 1 patents #11 of 102Top 15%
📍 Lorsch, MD: #1 of 1 inventorsTop 100%
Overall (2023): #363,673 of 537,848Top 70%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11733186 Device and method for analyzing a defect of a photolithographic mask or of a wafer Gabriel Baralia, Christof Baur, Thorsten Hofmann, Michael Budach 2023-08-22