Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11796563 | Apparatus and method for a scanning probe microscope | Christof Baur | 2023-10-24 |
| 11619882 | Method and apparatus for characterizing a microlithographic mask | Holger Seitz, Thomas Frank, Asad Rasool | 2023-04-04 |