Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11619882 | Method and apparatus for characterizing a microlithographic mask | Ulrich Matejka, Thomas Frank, Asad Rasool | 2023-04-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11619882 | Method and apparatus for characterizing a microlithographic mask | Ulrich Matejka, Thomas Frank, Asad Rasool | 2023-04-04 |