Issued Patents 2023
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815473 | Methods of inspecting samples with multiple beams of charged particles | Kuo-Feng TSENG, Zhonghua Dong, Zhong-Wei Chen | 2023-11-14 |
| 11808930 | Optical objective lens | Jian Zhang, Zhiwen KANG | 2023-11-07 |
| 11728131 | Thermal-aided inspection by advanced charge controller module in a charged particle system | Ning Ye, Jun Jiang, Jian Zhang | 2023-08-15 |
| 11682538 | Optical system with compensation lens | Jian Zhang, Zhiwen KANG | 2023-06-20 |
| 11637512 | Object table comprising an electrostatic clamp | Jan-Gerard Cornelis Van Der Toorn, Jeroen Gertruda Antonius HUINCK, Han Willem Hendrik SEVERT, Allard Eelco Kooiker, Michaël Johannes Christiaan RONDE +6 more | 2023-04-25 |
| 11581161 | Systems and methods for etching a substrate | Jie Fang, Qirong Zhang, Haojie Zhang, Jinmei Yang, Fenghui ZHU | 2023-02-14 |
| 11562884 | Current source apparatus and method | Yanqiu Wang, Xiaodong He, Guofan Ye | 2023-01-24 |