Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11581161 | Systems and methods for etching a substrate | Jie Fang, Yixiang Wang, Qirong Zhang, Haojie Zhang, Fenghui ZHU | 2023-02-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11581161 | Systems and methods for etching a substrate | Jie Fang, Yixiang Wang, Qirong Zhang, Haojie Zhang, Fenghui ZHU | 2023-02-14 |