Issued Patents 2023
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854765 | Multiple charged-particle beam apparatus and methods | Xuedong Liu, Xuerang Hu, Zhong-Wei Chen, Martinus Gerardus Johannes Maria MAASSEN | 2023-12-26 |
| 11804356 | Apparatus using multiple beams of charged particles | Xuerang Hu, Xuedong Liu, Zhong-Wei Chen | 2023-10-31 |
| 11798777 | Charged particle beam apparatus, and systems and methods for operating the apparatus | Martinus Gerardus Johannes Maria MAASSEN, Peter Paul HEMPENIUS, Zhongwei Chen | 2023-10-24 |
| 11721521 | Multi-beam inspection apparatus with improved detection performance of signal electrons | Xuedong Liu, Xuerang Hu, Zhong-Wei Chen | 2023-08-08 |
| 11715619 | Method and apparatus for charged particle detection | Yongxin Wang, Zhonghua Dong, Zhongwei Chen | 2023-08-01 |
| 11705304 | Apparatus of plural charged-particle beams | Shuai Li, Xuedong Liu, Juying Dou, Xuerang Hu, Zhongwei Chen | 2023-07-18 |
| 11688580 | Apparatus of plural charged-particle beams | Xuedong Liu, Shuai Li, Zhongwei Chen | 2023-06-27 |
| 11676793 | Apparatus of plural charged particle beams | Xuedong Liu, Xuerang Hu, Zhong-Wei Chen | 2023-06-13 |
| 11676792 | Sample pre-charging methods and apparatuses for charged particle beam inspection | Xuedong Liu, Qingpo Xi, Youfei Jiang, Xuerang Hu, Zhongwei Chen | 2023-06-13 |
| 11670477 | Apparatus using charged particle beams | Xuerang Hu, Xuedong Liu, Zhong-Wei Chen | 2023-06-06 |
| 11614416 | System and method for aligning electron beams in multi-beam inspection apparatus | Xuerang Hu, Xinan Luo, Qingpo Xi, Xuedong Liu | 2023-03-28 |
| 11594396 | Multi-beam inspection apparatus with single-beam mode | Xuedong Liu, Xuerang Hu, Zhong-Wei Chen | 2023-02-28 |
| 11587758 | Apparatus of plural charged-particle beams | Xuedong Liu, Xuerang Hu, Zhongwei Chen | 2023-02-21 |