Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798777 | Charged particle beam apparatus, and systems and methods for operating the apparatus | Martinus Gerardus Johannes Maria MAASSEN, Weiming Ren, Zhongwei Chen | 2023-10-24 |
| 11764030 | Stage apparatus suitable for electron beam inspection apparatus | Johannes Hubertus Antonius Van De Rijdt, Allard Eelco Kooiker, Jef GOOSSENS, Petrus Wilhelmus Vleeshouwers | 2023-09-19 |
| 11621142 | Substrate positioning device and electron beam inspection tool | Marcel Koenraad Marie Baggen, Maarten Frans Janus Kremers, Robertus Jacobus Theodorus Van Kempen, Sven Antoin Johan Hol, Henricus Martinus Johannes Van De Groes +3 more | 2023-04-04 |