Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11764027 | Systems and methods of cooling objective lens of a charged-particle beam system | Jeroen Gerard Gosen, Martijn Petrus Christianus Van Heumen, Dennis Herman Caspar Van Banning, Naseh Hosseini | 2023-09-19 |
| 11621142 | Substrate positioning device and electron beam inspection tool | Marcel Koenraad Marie Baggen, Peter Paul HEMPENIUS, Maarten Frans Janus Kremers, Robertus Jacobus Theodorus Van Kempen, Henricus Martinus Johannes Van De Groes +3 more | 2023-04-04 |