Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11804358 | System and methods for thermally conditioning a wafer in a charged particle beam apparatus | Jeroen Gerard Gosen | 2023-10-31 |
| 11764027 | Systems and methods of cooling objective lens of a charged-particle beam system | Jeroen Gerard Gosen, Sven Antoin Johan Hol, Dennis Herman Caspar Van Banning, Naseh Hosseini | 2023-09-19 |